Advanced MEMS Technology Support - メーカー・企業と製品の一覧

Advanced MEMS Technology Supportの製品一覧

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Advanced MEMS technology supports everything from prototype to mass production: 'Precision Electroforming'

Capable of producing thick films of 200μm or more, achieving a high hardness nickel coating.

Precision electroforming technology is one of the methods for manufacturing micro-mechanical components that are part of MEMS (Micro Electro Mechanical Systems). It accurately forms high-performance plating films on fine patterns created by photolithography technology. Our precision electroforming technology, unlike etching methods, can faithfully transfer high aspect ratio fine patterns in negative shapes and produce films of specified thickness quickly and without defects. We can prototype TEG patterns of trenches and holes with L/S=50/50 to 200/600μm, up to 4" wafer sizes. 【Main Features】 ■ Capable of producing thick films over 200μm ■ Achieves high hardness nickel plating (>600Hv) ■ Electroformed films with low residual stress due to low electrodeposition stress ■ Dense electroformed films without defects such as voids For more details, please contact us or download the catalog. E-mail: ogic@ogic.ne.jp Phone number: 096-352-4450

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